Arun Microelectronics

VSM23 X Translation Stage

$5,165.00 USD

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Options VSM23-X-100 100 mm Travel 5 µm Resolution VSM23-X-150 150 mm Travel 5 µm Resolution VSM23-X-200 200 mm Travel 5 µm Resolution VSM23-X-250 250 mm Travel 5 µm Resolution VSM23-X-300 300 mm Travel 5 µm Resolution VSM23-X-350 350 mm Travel 5 µm Resolution VSM23-X-400 200 mm Travel 5 µm Resolution

Quantity

Modular UHV Compatible Stage

Datasheet

Operating Instructions

Linear translation stage for ultra high vacuum applications. Travel ranges from 100 to 450 mm and can support loads up to 20 kg. 1 µm or 5 µm resolution available. Modular design enables direct compatibility with all VSM23 and VSM17 stages.

Compatible with AML's vacuum stage mounting brackets. These can be used to create multi-axis mechanisms with VSM stages.

Overview

Standard travels from 100 to 450 mm
5 µm resolution (1 µm for option HR)
Maximum speed 25 mm/s (5 mm/s for option HR)
Suitable for use to 1 x 10^-10 mBar
Directly stackable for XYZ orientations with all VSM23 and VSM17 stages
Lightweight design using UHV-prepared aluminium construction as standard
Limit switches and encoder options available
Stainless steel construction available (option SS)
Bakeable to 150°C (200°C for option SS)

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