VSM17-X Translation Stage

High Performance (Rigid), Modular UHV Compatible Stage

Linear translation stage suitable for use in UHV. Can support centred loads of up to 50 kilograms and travel from 50 to 300 mm. 5 µm resolution allows for precise in-vacuum motion.

Overview

• Standard travels from 50 to 300 mm
• 5 µm resolution (1 µm for option HR)
• Maximum speed 15 mm/s (3 mm/s for option HR)
• Directly stackable for XYZ orientations
• Suitable for use to 1 x 10^-10 mBar
• UHV-prepared aluminium construction as standard
• Stainless steel construction available (option SS)
• Bakeable to 150°C (200°C for option SS)