VLS UHV Compatible Limit Switches

UHV compatible limit switches used for repeatable limit detection for in-vacuum motion systems.

The switch is normally-closed (NC) and can be connected directly to an SMD3 or SMD4 stepper motor drive.

Overview

• UHV-compatible material construction
• Suitable for use to 1.3 x 10-10 mBar (1 x 10-10 Torr)
• Repeatability: ± <1µm
• Overtravel: 2 mm
• Switching current: 50 mA
• Switching voltage: 30 Vdc
• High temperature - bakeable to 200°C
• Normally-closed (NC)
• 22 AWG polyimide insulated wires
• VLS1 - 3/8-24 UNF external thread with 2 matching nuts