AGP-1 MEMS Active Pirani and Piezo Gauge

The AGP Pirani gauge incorporates cutting edge MEMS sensor technology with precision digital signal processing and advanced measurement algorithms.

Overview

• Measurement range of 1 x 10^-6 to 1333 mBar (7.5 x 10^-7 to 1000 Torr)
• Ultra-wide range high performance MEMS sensors
• Advanced innovative digital signal processing
• Precision gas-independent sensor from 5 to 1200 mBar
• Mountable in any orientation without impact on performance
• Programmable voltage output signal
• Digital RS-232 interface
• One solid-state setpoint for process control
• High overpressure tolerance of 10 bar (145 psi)
• Robust, compact stainless steel flange and enclosure design