{"title":"UHV Mechanisms","description":"\u003cp\u003eProducts include Linear Translators, Vertical Translators, Rotary Stages, and Goniometer Stages\u003c\/p\u003e","products":[{"product_id":"uhv-rsb-rotation-stage","title":"UHV RSB Rotation Stage","description":"\u003ch2\u003e\u003csmall\u003eLow Cost UHV Rotation Stage\u003c\/small\u003e\u003c\/h2\u003e\n\u003cp\u003eAML ultra high vacuum compatible rotation stages are intended for intermittent rotation of balanced loads or as a precision gearbox. They are manufactured with UHV compatible material and construction methods and utilize AML D35.1 UHV stepper motors.\u003c\/p\u003e\n\u003ch3 class=\"h5 aml-purple\"\u003eOverview\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eResolutions from 0.036° to 0.004° per step\u003c\/li\u003e\n\u003cli\u003eUnloaded backlash is less than resolution\u003c\/li\u003e\n\u003cli\u003eIntended for intermittent rotation of balanced loads of up to 1 kg\u003c\/li\u003e\n\u003cli\u003eRSB10K\/20K\/30K can stack on AML translation stages\u003c\/li\u003e\n\u003cli\u003eSuitable for use below 1 x 10\u003csup\u003e-10\u003c\/sup\u003e mBar\u003c\/li\u003e\n\u003cli\u003eBakeable to 200°C\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Arun Microelectronics","offers":[{"title":"RSB10K Rotation Stage. 10000 Steps Per Revolution","offer_id":42123960516683,"sku":null,"price":5537.31,"currency_code":"USD","in_stock":true},{"title":"RSB 20K Rotation Stage 20000 Steps Per Revolution","offer_id":42123960549451,"sku":null,"price":5537.31,"currency_code":"USD","in_stock":true},{"title":"RSB 30K Rotation Stage 30000 Steps Per Revolution","offer_id":42123960582219,"sku":null,"price":6212.68,"currency_code":"USD","in_stock":true},{"title":"RSB 90K Rotation Stage 90000 Steps Per Revolution","offer_id":42123960614987,"sku":null,"price":8001.29,"currency_code":"USD","in_stock":true},{"title":"RSB 120K Rotation Stage 120000 Steps Per Revolution","offer_id":42123960647755,"sku":null,"price":8139.83,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0624\/0760\/6347\/files\/RSB10K.jpg?v=1771338848"},{"product_id":"vsm17-r-3k6-rotation-stage","title":"VSM17-R-3K6 Rotation Stage","description":"\u003ch2\u003e\u003csmall\u003eZero Backlash UHV Rotation Stage\u003c\/small\u003e\u003c\/h2\u003e\n\u003cdiv class=\"mt-4\"\u003e\u003ca class=\"mr-3 ds_om_top_of_page\" href=\"https:\/\/arunmicro.com\/documentation\/Datasheet_VSM17-R-3K6.pdf?=1770405382\" target=\"_blank\"\u003e\u003ci class=\"fas fa-file-pdf fa-lg fa-fw mr-1\"\u003e\u003c\/i\u003eDatasheet\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv class=\"mt-4\"\u003e\n\u003ca class=\"mr-3 ds_om_top_of_page\" href=\"https:\/\/arunmicro.com\/documentation\/Manual_VSM17-R.pdf?=1770405382\" target=\"_blank\"\u003e\u003ci class=\"fas fa-file-pdf fa-lg fa-fw mr-1\"\u003e\u003c\/i\u003eOperating Instructions\u003c\/a\u003e\u003cbr\u003e\u003cbr\u003e\n\u003c\/div\u003e\n\u003cp\u003eRotation stage suitable for use in UHV. Can support loads of up to 100 kg. 0.1° resolution with 360° of continuous rotation.\u003c\/p\u003e\n\u003ch3 class=\"h5 aml-purple\"\u003eOverview\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003e360° continuous rotation range\u003c\/li\u003e\n\u003cli\u003e0.1° resolution per step\u003c\/li\u003e\n\u003cli\u003eBacklash less than the resolution\u003c\/li\u003e\n\u003cli\u003eLoad capacity 100 kg\u003c\/li\u003e\n\u003cli\u003eMaximum loaded speed of up to 100 rpm\u003c\/li\u003e\n\u003cli\u003eMaximum torque of up to 1 Nm\u003c\/li\u003e\n\u003cli\u003eSuitable for use to 1 x 10\u003csup\u003e-10\u003c\/sup\u003e mBar\u003c\/li\u003e\n\u003cli\u003eBakeable to 200 °C\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Arun Microelectronics","offers":[{"title":"Default Title","offer_id":42123962941515,"sku":null,"price":9347.08,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0624\/0760\/6347\/files\/VSM17-R-3K61.jpg?v=1771338713"},{"product_id":"vsm17-x-translation-stage","title":"VSM17-X Translation Stage","description":"\u003ch2\u003e\u003csmall\u003eHigh Performance (Rigid), Modular UHV Compatible Stage\u003c\/small\u003e\u003c\/h2\u003e\n\u003cdiv class=\"mt-4\"\u003e\u003ca class=\"mr-3 ds_om_top_of_page\" href=\"https:\/\/arunmicro.com\/documentation\/Datasheet_VSM17-X.pdf?=1770405592\" target=\"_blank\"\u003e\u003ci class=\"fas fa-file-pdf fa-lg fa-fw mr-1\"\u003e\u003c\/i\u003eDatasheet\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv class=\"mt-4\"\u003e\u003ca class=\"mr-3 ds_om_top_of_page\" href=\"https:\/\/arunmicro.com\/documentation\/Manual_VSM17-X.pdf?=1770405592\" target=\"_blank\"\u003e\u003ci class=\"fas fa-file-pdf fa-lg fa-fw mr-1\"\u003e\u003c\/i\u003eOperating Instructions\u003c\/a\u003e\u003c\/div\u003e\n\u003cp class=\"h6 my-4 text-dark\"\u003e\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003eLinear translation stage suitable for use in UHV. Can support centred loads of up to 50 kilograms and travel from 50 to 300 mm. 5 µm resolution allows for precise in-vacuum motion.\u003c\/p\u003e\n\u003ch3 class=\"h5 aml-purple\"\u003eOverview\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eStandard travels from 50 to 300 mm\u003c\/li\u003e\n\u003cli\u003e5 µm resolution (1 µm for option HR)\u003c\/li\u003e\n\u003cli\u003eMaximum speed 15 mm\/s (3 mm\/s for option HR)\u003c\/li\u003e\n\u003cli\u003eDirectly stackable for XYZ orientations\u003c\/li\u003e\n\u003cli\u003eSuitable for use to 1 x 10\u003csup\u003e-10\u003c\/sup\u003e mBar\u003c\/li\u003e\n\u003cli\u003eUHV-prepared aluminium construction as standard\u003c\/li\u003e\n\u003cli\u003eStainless steel construction available (option SS)\u003c\/li\u003e\n\u003cli\u003eBakeable to 150°C (200°C for option SS)\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Arun Microelectronics","offers":[{"title":"VSM17-X-050 50 mm Travel 5 µm Resolution","offer_id":42123966939211,"sku":null,"price":6551.79,"currency_code":"USD","in_stock":true},{"title":"VSM17-X-100 100 mm Travel 5 µm Resolution","offer_id":42123966971979,"sku":null,"price":8246.39,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0624\/0760\/6347\/files\/VSM17-X-501.jpg?v=1771270739"},{"product_id":"vsm17-z-translation-stage-copy","title":"VSM17-Z Translation Stage","description":"\u003ch2\u003e\u003csmall\u003eModular UHV Stage for Z-Axis Translation\u003c\/small\u003e\u003c\/h2\u003e\n\u003cdiv class=\"mt-4\"\u003e\u003ca href=\"https:\/\/arunmicro.com\/documentation\/Datasheet_VSM17-Z.pdf?=1770406227\" class=\"mr-3 ds_om_top_of_page\" target=\"_blank\"\u003e\u003ci class=\"fas fa-file-pdf fa-lg fa-fw mr-1\"\u003e\u003c\/i\u003eDatasheet\u003c\/a\u003e\u003c\/div\u003e\n\u003cdiv class=\"mt-4\"\u003e\u003ca href=\"https:\/\/arunmicro.com\/documentation\/Manual_VSM17-Z.pdf?=1770406227\" class=\"mr-3 ds_om_top_of_page\" target=\"_blank\"\u003e\u003ci class=\"fas fa-file-pdf fa-lg fa-fw mr-1\"\u003e\u003c\/i\u003eOperating Instructions\u003c\/a\u003e\u003c\/div\u003e\n\u003cp class=\"h6 my-4 text-dark\"\u003e \u003c\/p\u003e\n\u003cp\u003eLinear vertical translation stage suitable for use in UHV. Can support loads of up to several kilograms and travel from 50 mm. Designed specifically for Z-axis translation, the sample table is always above the mechanism across the stage's full range of travel. Suitable for loads up to 30 kg.\u003c\/p\u003e\n\u003ch3 class=\"h5 aml-purple\"\u003eOverview\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eStandard travels from 50 to 70 mm\u003c\/li\u003e\n\u003cli\u003e1 µm resolution\u003c\/li\u003e\n\u003cli\u003e30 kg centred load capacity\u003c\/li\u003e\n\u003cli\u003eMaximum speed of 5 mm\/sec\u003c\/li\u003e\n\u003cli\u003eDesigned for Z-axis translation\u003c\/li\u003e\n\u003cli\u003eSuitable for use to 1 x 10\u003csup\u003e-10\u003c\/sup\u003e mBar\u003c\/li\u003e\n\u003cli\u003eBakeable to 200 °C\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Arun Microelectronics","offers":[{"title":"VSM17-Z-050 50 mm Travel 1 µm Resolution","offer_id":42123972214859,"sku":null,"price":5564.52,"currency_code":"USD","in_stock":true},{"title":"VSM17-Z-070 70 mm Travel 1 µm Resolution","offer_id":42123972247627,"sku":null,"price":6982.05,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0624\/0760\/6347\/files\/vsm17x0501.jpg?v=1771338356"},{"product_id":"vsm23-x-translation-stage-copy","title":"VSM23 X Translation Stage","description":"\u003ch2\u003e\u003csmall\u003eModular UHV Compatible Stage\u003c\/small\u003e\u003c\/h2\u003e\n\u003cdiv class=\"mt-4\"\u003e\u003c\/div\u003e\n\u003cp class=\"h6 my-4 text-dark\"\u003e\u003ca class=\"mr-3 ds_om_top_of_page\" href=\"https:\/\/arunmicro.com\/documentation\/Datasheet_VSM23-X.pdf?=1770407060\" target=\"_blank\"\u003eDatasheet\u003c\/a\u003e\u003c\/p\u003e\n\u003cp class=\"h6 my-4 text-dark\"\u003e\u003ca class=\"mr-3 ds_om_top_of_page\" href=\"https:\/\/arunmicro.com\/documentation\/Manual_VSM23-X.pdf?=1770407060\" target=\"_blank\"\u003e\u003ci class=\"fas fa-file-pdf fa-lg fa-fw mr-1\"\u003e\u003c\/i\u003eOperating Instructions\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003eLinear translation stage for ultra high vacuum applications. Travel ranges from 100 to 450 mm and can support loads up to 20 kg. 1 µm or 5 µm resolution available. Modular design enables direct compatibility with all VSM23 and VSM17 stages.\u003cbr\u003e\u003cbr\u003eCompatible with AML's vacuum stage mounting brackets. These can be used to create multi-axis mechanisms with VSM stages.\u003c\/p\u003e\n\u003ch3 class=\"h5 aml-purple\"\u003eOverview\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eStandard travels from 100 to 450 mm\u003c\/li\u003e\n\u003cli\u003e5 µm resolution (1 µm for option HR)\u003c\/li\u003e\n\u003cli\u003eMaximum speed 25 mm\/s (5 mm\/s for option HR)\u003c\/li\u003e\n\u003cli\u003eSuitable for use to 1 x 10\u003csup\u003e-10\u003c\/sup\u003e mBar\u003c\/li\u003e\n\u003cli\u003eDirectly stackable for XYZ orientations with all VSM23 and VSM17 stages\u003c\/li\u003e\n\u003cli\u003eLightweight design using UHV-prepared aluminium construction as standard\u003c\/li\u003e\n\u003cli\u003eLimit switches and encoder options available\u003c\/li\u003e\n\u003cli\u003eStainless steel construction available (option SS)\u003c\/li\u003e\n\u003cli\u003eBakeable to 150°C (200°C for option SS)\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Arun Microelectronics","offers":[{"title":"VSM23-X-100 100 mm Travel 5 µm Resolution","offer_id":42123975950411,"sku":null,"price":5165.0,"currency_code":"USD","in_stock":true},{"title":"VSM23-X-150 150 mm Travel 5 µm Resolution","offer_id":42123975983179,"sku":null,"price":5780.0,"currency_code":"USD","in_stock":true},{"title":"VSM23-X-200 200 mm Travel 5 µm Resolution","offer_id":42123977162827,"sku":null,"price":6813.0,"currency_code":"USD","in_stock":true},{"title":"VSM23-X-250 250 mm Travel 5 µm Resolution","offer_id":42123977195595,"sku":null,"price":7099.0,"currency_code":"USD","in_stock":true},{"title":"VSM23-X-300 300 mm Travel 5 µm Resolution","offer_id":42123977228363,"sku":null,"price":7696.0,"currency_code":"USD","in_stock":true},{"title":"VSM23-X-350 350 mm Travel 5 µm Resolution","offer_id":42123977261131,"sku":null,"price":8122.0,"currency_code":"USD","in_stock":true},{"title":"VSM23-X-400 200 mm Travel 5 µm Resolution","offer_id":42123977293899,"sku":null,"price":0.0,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0624\/0760\/6347\/files\/VSM23X1001.jpg?v=1771338046"}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0624\/0760\/6347\/collections\/UHV_Mechanisms.jpg?v=1753724864","url":"https:\/\/microphotonics.shop\/collections\/uhv-mechanisms.oembed","provider":"Micro Photonics ","version":"1.0","type":"link"}